However, in offline analysis in version 5 Nanoscope software, the step height analysis displays height with up to 5 significant figures. The above is true for offline analysis in version 6 software and in NanoScope Analysis thru version 1.5, as far as I know. In section analysis, the height difference is based on single point values. In step height analysis, the elevation of the upper and lower levels is based on an average of a selected range of data points. This difference in display precision is ironic, because the step height value deserves more precision, not less. In step height analysis, the same data gives a displayed step height of 200 nm, with no digits after the decimal point.
In section analysis, the vertical difference between two points is reported with 3 digits after the decimal point.
This message concerns features that are inferior in NanoScope Analysis when compared with a benchmark software, NanoScope ver 5.31r1.ġ) In NanoScope Analysis, Section analysis provides a high precision measurement but Step Height analysis does not.
